JPS6266157U - - Google Patents
Info
- Publication number
- JPS6266157U JPS6266157U JP15808285U JP15808285U JPS6266157U JP S6266157 U JPS6266157 U JP S6266157U JP 15808285 U JP15808285 U JP 15808285U JP 15808285 U JP15808285 U JP 15808285U JP S6266157 U JPS6266157 U JP S6266157U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- shunt
- mass spectrometer
- ion beam
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158082U JPH0342620Y2 (en]) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158082U JPH0342620Y2 (en]) | 1985-10-16 | 1985-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6266157U true JPS6266157U (en]) | 1987-04-24 |
| JPH0342620Y2 JPH0342620Y2 (en]) | 1991-09-06 |
Family
ID=31081233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985158082U Expired JPH0342620Y2 (en]) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342620Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156209A (ja) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | イオンビーム／荷電粒子ビーム照射装置 |
| JP2007516573A (ja) * | 2003-05-15 | 2007-06-21 | アクセリス テクノロジーズ インコーポレーテッド | リボンビーム型イオン注入機のための高分析分離磁石 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53134892U (en]) * | 1977-03-31 | 1978-10-25 |
-
1985
- 1985-10-16 JP JP1985158082U patent/JPH0342620Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53134892U (en]) * | 1977-03-31 | 1978-10-25 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007516573A (ja) * | 2003-05-15 | 2007-06-21 | アクセリス テクノロジーズ インコーポレーテッド | リボンビーム型イオン注入機のための高分析分離磁石 |
| JP2006156209A (ja) * | 2004-11-30 | 2006-06-15 | Sumitomo Eaton Noba Kk | イオンビーム／荷電粒子ビーム照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342620Y2 (en]) | 1991-09-06 |